1/4 Butt Weld Pneumatic Diaphragm Valve 20.5MPa UHP Bellows Type for Semiconductor Process Gas Systems

• Customization: Available
• Standard: ANSI
• Material: Stainless Steel
• Model NO.: NFA
• Connection: Od
• Surface Treatment: Phosphide
• Head Type: Hexagon
• Pressure: High Pressure
• Medium: Gas
• Treatment: Ba Ep
• Brand: Nai-Lok
• Original: China
• Transport Package: Carton
• Specification: 1/4-1"
• Trademark: Nailok
• Origin: China
• Production Capacity: 10000 Pieces/Month
• Package Size: 51.00cm * 51.00cm * 45.00cm
• Package Gross Weight: 22.000kg

Product Description

Nai-Lok Ultra High Purity Manual & Pneumatic Actuator Diaphragm Valve

Diaphragm Valve High Performance 20.5Mpa High Pressure Male 1/4 Metal Face Seal Pneumatic Diaphragm Valve for UHP Semiconductor

We have the capability to manufacture and supply 4 different product categories, including:
1. General Instrumentation Valves and Fittings
2. High Purity & Ultra High Purity Products- NAI-LOK UHP PRODUCTS
3. Hose & Tubing
4. Special Alloy Valves
We strive to develop, serve global customers and provide stable and reliable products.

The NAI-LOK Ultra High Purity (UHP) Diaphragm Valve is engineered for high-pressure, ultra-clean gas and fluid control in semiconductor, pharmaceutical, and specialty gas industries. Available in manual and pneumatic actuator configurations, this valve delivers exceptional sealing performance, corrosion resistance, and contamination-free operation at pressures up to 20.5 MPa (3000 psi).
 Ultra High Purity (UHP) Design - Ideal for semiconductor gas delivery, chemical processing, and high-purity applications with minimal particle generation.
 High-Pressure Capability - Rated for 20.5 MPa (3000 psi), ensuring reliable performance in demanding environments.
 Male 1/4" Metal Face Seal (MFS) - Leak-tight connection for gas panels, vacuum systems, and high-purity gas lines.
 Diaphragm Sealing Technology - Prevents internal contamination and ensures zero leakage, critical for UHP processes.
 Corrosion-Resistant Materials - 316L stainless steel body with PTFE or EPDM diaphragms for chemical compatibility.
 Manual & Pneumatic Actuation Options - Flexible control for automated or manual operation.
 

Product Parameters

For Diaphgram Valve

Body Material	SS316L
Diaphragm	Nicke-cobalt alloy
Seat Packing	PCTFE
Handle	ADC12

• Semiconductor Manufacturing - Gas distribution for etching, CVD, ALD, and ion implantation.

• Pharmaceutical & Biotechnology - Sterile fluid handling in production and cleanroom environments.

• Specialty Gas Systems - Safe control of high-purity, toxic, or corrosive gases.

• Aerospace & Analytical Instruments - Precision flow control in fuel systems and lab equipment.