Nai-Lokuhp Ultra High Purity Gas Stick Regulator with Diaphragm Valve for Gas Delivery System

Product Details
Customization: Available
Media: Gas
Certification: ISO, Mtc
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Plant Area
15000 square meters
Management System Certification
ISO 9001
  • Nai-Lokuhp Ultra High Purity Gas Stick Regulator with Diaphragm Valve for Gas Delivery System
  • Nai-Lokuhp Ultra High Purity Gas Stick Regulator with Diaphragm Valve for Gas Delivery System
  • Nai-Lokuhp Ultra High Purity Gas Stick Regulator with Diaphragm Valve for Gas Delivery System
  • Nai-Lokuhp Ultra High Purity Gas Stick Regulator with Diaphragm Valve for Gas Delivery System
  • Nai-Lokuhp Ultra High Purity Gas Stick Regulator with Diaphragm Valve for Gas Delivery System
  • Nai-Lokuhp Ultra High Purity Gas Stick Regulator with Diaphragm Valve for Gas Delivery System
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Basic Info.

Model NO.
Ultra High Purity Regulator
Temperature
Low Temperature
Connection
Thread
Valve Seat
Single-Seat
Material
Stainless Steel
Working Pressure
6000psi
Design
1 PC Design
Seat
PFA
Handle
Visible Indicator Handle
Test
All Valves Are Helium Leak Tested
Transport Package
Carton
Specification
1/4, 3/8, 1/2
Trademark
NAI-LOK
Origin
China
HS Code
8481804090

Product Description

NAI-LOKUHP Ultra High Purity Gas Stick Regulator with diaphragm valve for gas delivery system

 

Features:

  • Single stage.

    For purity, inert, reactive, flammable and oxidizing gas and gas mixtures.

    Hastelloy-internals for corrosive gases

    Optional contact pressure gauges for gas supply failure monitoring

    Laboratory pressure control

    Operating Temperature:-40ºF to 165ºF/-40ºC to 74ºC
     

    1. SS316L construction

    2. 10μin. surface finish(25μin.optional)

    3.Vacuum to 3500 pisg(241 bar)inlet

    4. 1to 150psig (0.07 to 10bar)outlet

    5. Cleaned,assembled and packaged for high purity semiconductor applications

    6.Flow rates 

        - Standard to 30 slpm

        -HF option to 120slpm

    7.Regulator of choice for point of use applications

Technical Date:
 

Body Material: 316 Stainless Steel
Port Type: Metal Face Seal
Size : 1/4 in.
Ball valve : One diaphragm valve
Inlet Pressure : 4,000psig (276 bar)
Outlet Pressure Range: 30 to 150psig (0 to 10.3 bar)                                         
Panel material: SS304
Optional: Welding fittings
Series PRM Series
Other Parameters
 
Inlet/outlet connectors
1/4 or 3/8 inch face seal or tube weld
Flow coefficient(Cv)
0.09(0.15 HF option)
Internal volume
0.49 in3 (8 cm3)
Operating Temperature
-40ºF to 160ºF 
Surface finish
10 μin.(0.25μm) Ra avg.standard
25 μin.(0.62 μm)Ra avg.optional
Inboard leakage
2 x 10-10 sccs
Outboard leakage
2 x 10-9 sccs He
Leakage across seat
4 x 10-8 sccs He
Installation
surface or panel(optional)
Supply Pressure effect
                                        HF
0.25 psig per 100 psig source pressure change
HF 0.75 pisg per 100 psig source pressure change

Nai-Lokuhp Ultra High Purity Gas Stick Regulator with Diaphragm Valve for Gas Delivery SystemNai-Lokuhp Ultra High Purity Gas Stick Regulator with Diaphragm Valve for Gas Delivery System

Nai-Lokuhp Ultra High Purity Gas Stick Regulator with Diaphragm Valve for Gas Delivery SystemNai-Lokuhp Ultra High Purity Gas Stick Regulator with Diaphragm Valve for Gas Delivery System

Nai-Lokuhp Ultra High Purity Gas Stick Regulator with Diaphragm Valve for Gas Delivery System

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