Customization: | Available |
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Media: | Gas |
Certification: | ISO, Mtc |
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Features:
Single stage.
For purity, inert, reactive, flammable and oxidizing gas and gas mixtures.
Hastelloy-internals for corrosive gases
Optional contact pressure gauges for gas supply failure monitoring
Laboratory pressure control
Operating Temperature:-40ºF to 165ºF/-40ºC to 74ºC
1. SS316L construction
2. 10μin. surface finish(25μin.optional)
3.Vacuum to 3500 pisg(241 bar)inlet
4. 1to 150psig (0.07 to 10bar)outlet
5. Cleaned,assembled and packaged for high purity semiconductor applications
6.Flow rates
- Standard to 30 slpm
-HF option to 120slpm
7.Regulator of choice for point of use applications
Technical Date:
Body Material: | 316 Stainless Steel |
Port Type: | Metal Face Seal |
Size : | 1/4 in. |
Ball valve : | One diaphragm valve |
Inlet Pressure : | 4,000psig (276 bar) |
Outlet Pressure Range: | 30 to 150psig (0 to 10.3 bar) |
Panel material: | SS304 |
Optional: | Welding fittings |
Series | PRM Series |