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Features:
The Ultra High Purity (UHP) Gas Canister is engineered for industries requiring precision gas handling and contamination-free delivery, such as semiconductor fabrication, pharmaceuticals, and analytical laboratories. Built for 6N purity (99.9999%), it ensures consistent and safe gas flow in critical processes like etching, deposition, and gas chromatography.
Manufactured from 316L stainless steel with electropolished inner surfaces (Ra ≤ 0.25 μm), the canister minimizes particulate shedding, outgassing, and potential contamination. The design supports both high-pressure (up to 3000 psi / 20.7 MPa) and high-vacuum applications, making it versatile across gas supply systems.
6N Ultra High Purity Gas Storage - Maintains integrity of reactive, inert, or specialty gases
Electropolished SS316L Body - Corrosion-resistant and ultra-clean internal finish
High Pressure & Vacuum Compatibility - Reliable operation under challenging conditions
Helium Leak Tested - Leak rate certified to < 1×10 atm·cc/sec
Compliance - Meets SEMI standards, ASME BPE, and ISO certifications
Custom Options Available - Ranges from 1L to 50L, with varied valve types and end connections
| Parameter | Specification |
|---|---|
| Material | SS316L Electropolished (Ra ≤ 0.25 µm) |
| Gas Purity | 99.9999% (6N) or higher |
| Pressure Rating | Up to 3000 psi (20.7 MPa) |
| Leak Rate | <1×10 atm·cc/sec He |
| Internal Finish | Electropolished (EP) or Mechanically Polished (MP) |
| Valve Options | Pneumatic, Manual, or Diaphragm Valves |
| Connections | Metal Face Seal |
| Compliance | SEMI, ASME BPE, ISO 9001, ISO 14644 |
Semiconductor Manufacturing - Safe storage for SiH, NH, NF, and other process gases
Pharmaceutical & Biotechnology - Ensures sterile gas delivery for drug production
Analytical Laboratories - Used in GC, ICP-MS, and FTIR systems
LED & Solar Cell Production - Critical for MOCVD and thin-film deposition
Aerospace & Research - High-purity gas supply for fuel testing and material science
Ultra High Purity Gas Canister UHP Gas Storage Cylinder for Semiconductors High-Precision 6N Gas Canister SS316L Electropolished Gas Cylinder SEMI-Compliant UHP Gas Container Leak-Proof High-Pressure Gas Canister Gas Delivery System for Etching & Deposition Pharmaceutical Grade Gas Storage Solution
We offer tailored UHP gas canisters based on your specific needs:
Volume Options: 1L, 5L, 10L, 20L, 50L
Valve Types: Manual, Pneumatic, or Diaphragm
Pressure Ratings: From 500 psi to 3000 psi
Special Coatings: Passivation, Nickel Plating
Integrated Filtration: In-line particulate filters
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