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Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment

Suzhou Nai Lok Fluid Technology Co., Ltd.
  • Audited Supplier
  • 5 yrs

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Product Highlights

  • UHP Design: Ideal for semiconductor gas delivery with minimal particle generation.
  • High-Pressure Capability: Rated for 20.5 MPa (3000 psi) for reliable performance.
  • Leak-Tight Connection: Male 1/4 Metal Face Seal (MFS) for gas panels and vacuum systems.
  • Zero Leakage: Diaphragm sealing technology prevents internal contamination.
  • Corrosion Resistance: 316L stainless steel body with PTFE or EPDM diaphragms.
  • Flexible Actuation: Available in manual and pneumatic actuator configurations.
  • Semiconductor Grade: Ep Grade suitable for etching, CVD, ALD, and ion implantation.
  • In Stock Delivery: Fast delivery available with a minimum order of 2 PCS.

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Product Images of Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment

Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment
Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment pictures & photos
Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment
Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment pictures & photos
Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment
Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment pictures & photos
Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment
Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment pictures & photos
Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment
Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment pictures & photos
Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment
Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment pictures & photos
Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment
  • Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment
  • Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment
    Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment
  • Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment
    Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment
  • Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment
    Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment
  • Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment
    Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment
  • Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment
    Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment
  • Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment
    Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment

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Product Description

Product Description

NAI-LOK UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1Mpa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment

We have the capability to manufacture and supply 4 different product categories, including:
1. General Instrumentation Valves and Fittings
2. High Purity & Ultra High Purity Products- NAI-LOK UHP PRODUCTS
3. Hose & Tubing
4. Special Alloy Valves
We strive to develop, serve global customers and provide stable and reliable products.

The NAI-LOK Ultra High Purity (UHP) Diaphragm Valve is engineered for high-pressure, ultra-clean gas and fluid control in semiconductor, pharmaceutical, and specialty gas industries. Available in manual and pneumatic actuator configurations, this valve delivers exceptional sealing performance, corrosion resistance, and contamination-free operation at pressures up to 20.5 MPa (3000 psi).

 Ultra High Purity (UHP) Design - Ideal for semiconductor gas delivery, chemical processing, and high-purity applications with minimal particle generation.
 High-Pressure Capability - Rated for 20.5 MPa (3000 psi), ensuring reliable performance in demanding environments.
 Male 1/4" Metal Face Seal (MFS) - Leak-tight connection for gas panels, vacuum systems, and high-purity gas lines.
 Diaphragm Sealing Technology - Prevents internal contamination and ensures zero leakage, critical for UHP processes.
 Corrosion-Resistant Materials - 316L stainless steel body with PTFE or EPDM diaphragms for chemical compatibility.
 Manual & Pneumatic Actuation Options - Flexible control for automated or manual operation.

Product Parameters

 
Inlet Pressure 3.500psig[241bar)
  For UR101 300 pisg[21bar)
UR 101 1 to 10 psig(0.07 to 0.7bar)
UR 102 1 t0 30psig(0.07 to 2bar)
UR 106 2 to 60psig(0.14to 4bar)
UR 1001 2 to 100psig(0.14 to 7bar)
UR 1005 5 to 150psig(0.34 to 10bar)
Design Proof Pressure 5000psig[345bar)
Burst Pressure 10000psig(690bar)

For Diaphgram Valve
 
Body Material SS316L
Diaphragm Nicke-cobalt alloy
Seat Packing PCTFE
Handle ADC12

Application

  • Semiconductor Manufacturing - Gas distribution for etching, CVD, ALD, and ion implantation.

  • Pharmaceutical & Biotechnology - Sterile fluid handling in API production and cleanroom environments.

  • Specialty Gas Systems - Safe control of high-purity, toxic, or corrosive gases.

  • Aerospace & Analytical Instruments - Precision flow control in fuel systems and lab equipment.

Detailed Photos


Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases EquipmentNai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases EquipmentNai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases EquipmentNai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases EquipmentNai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases EquipmentNai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases EquipmentNai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment
Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases EquipmentNai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases EquipmentNai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment

About the Supplier

This supplier has been audited by TÜV Rheinland. Verify the report on the official TÜV Rheinland website with ID "MIC-ASI264759". Items marked "verified" are certified.

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Suzhou Nai Lok Fluid Technology Co., Ltd.
Suzhou Nai Lok Fluid Technology Co., Ltd.
Suzhou Nai Lok Fluid Technology Co., Ltd.
Suzhou Nai Lok Fluid Technology Co., Ltd.
Suzhou Nai Lok Fluid Technology Co., Ltd.
Suzhou Nai Lok Fluid Technology Co., Ltd.
Suzhou Nai Lok Fluid Technology Co., Ltd.
Suzhou Nai Lok Fluid Technology Co., Ltd.

About Our Factory & Business Background

verified Business Type
Manufacturer/Factory & Trading Company
Address
397 Damuqiao Road, Shaxi Town, Taicang City, Suzhou, Jiangsu, China
verified Terms of Payment
LC, T/T
verified International Commercial Terms(Incoterms)
FOB, CIF, CFR, EXW
Average Lead Time
Peak Season Lead Time: within 15 workdays
Off Season Lead Time: one month
verified Nearest Port
Shanghai Port
verified Minimum Order Quantity
1 Piece

Our Production Capability & Technical Expertise

Main Products
Gas Delivery System, Ball Valve, Pressure Regulator, Alloy Valve, 2/3/5 Valve Manifold, Instrumentation Ball Valves, Sample Cylinder, Pipe & Tube Fittings, Needle Valve, Hose & Tubing
verified Inspection Type for Finished Products
100% inspection(Visual inspection & Function inspection)
verified Inspection Method for Finished Products
Have instructions and uniformly followed
verified Customization Options
Customization from Samples, Customization from Designs, Full Customization, Minor Customization, Flexible customization
verified Traceability of Raw Materials
Yes

Our Industry Experience & Global Business Record

Main Markets
North America, South America, Eastern Europe, Southeast Asia, Africa, Oceania, Mid East, Eastern Asia, Western Europe
verified Repeat Buyers Choice
50%~80%

Our Certifications, Standards & Industry Recognition

verified Management System Certification
ISO9001:2015, ISO14001

FAQ

What is the maximum pressure rating?
The valve is rated for up to 20.5 MPa (3000 psi) and has a burst pressure of 10000 psig (690 bar).
What materials are used for the valve body and diaphragm?
The body is made of SS316L stainless steel, and the diaphragm uses a nickel-cobalt alloy, PCTFE seat packing, or EPDM options.
What are the main application industries?
It is used in semiconductor manufacturing, pharmaceuticals, specialty gas systems, and aerospace analytical instruments.
What is the minimum order quantity (MOQ)?
The minimum order quantity is 2 pieces.
Is customization available?
Yes, customization options include samples, designs, full customization, minor customization, and flexible customization.
What are the payment terms?
Payment terms include LC (Letter of Credit) and T/T (Telegraphic Transfer).
What is the lead time for production?
Peak season lead time is within 15 workdays, while off-season lead time is one month.
What connection type does this valve use?
It features a Male 1/4 Metal Face Seal (MFS) connection for leak-tight performance.

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