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NAI-LOK UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1Mpa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment
We have the capability to manufacture and supply 4 different product categories, including:The NAI-LOK Ultra High Purity (UHP) Diaphragm Valve is engineered for high-pressure, ultra-clean gas and fluid control in semiconductor, pharmaceutical, and specialty gas industries. Available in manual and pneumatic actuator configurations, this valve delivers exceptional sealing performance, corrosion resistance, and contamination-free operation at pressures up to 20.5 MPa (3000 psi).
Ultra High Purity (UHP) Design - Ideal for semiconductor gas delivery, chemical processing, and high-purity applications with minimal particle generation.
High-Pressure Capability - Rated for 20.5 MPa (3000 psi), ensuring reliable performance in demanding environments.
Male 1/4" Metal Face Seal (MFS) - Leak-tight connection for gas panels, vacuum systems, and high-purity gas lines.
Diaphragm Sealing Technology - Prevents internal contamination and ensures zero leakage, critical for UHP processes.
Corrosion-Resistant Materials - 316L stainless steel body with PTFE or EPDM diaphragms for chemical compatibility.
Manual & Pneumatic Actuation Options - Flexible control for automated or manual operation.
| Inlet Pressure | 3.500psig[241bar) |
| For UR101 300 pisg[21bar) | |
| UR 101 | 1 to 10 psig(0.07 to 0.7bar) |
| UR 102 | 1 t0 30psig(0.07 to 2bar) |
| UR 106 | 2 to 60psig(0.14to 4bar) |
| UR 1001 | 2 to 100psig(0.14 to 7bar) |
| UR 1005 | 5 to 150psig(0.34 to 10bar) |
| Design Proof Pressure | 5000psig[345bar) |
| Burst Pressure | 10000psig(690bar) |
| Body Material | SS316L |
| Diaphragm | Nicke-cobalt alloy |
| Seat Packing | PCTFE |
| Handle | ADC12 |
Semiconductor Manufacturing - Gas distribution for etching, CVD, ALD, and ion implantation.
Pharmaceutical & Biotechnology - Sterile fluid handling in API production and cleanroom environments.
Specialty Gas Systems - Safe control of high-purity, toxic, or corrosive gases.
Aerospace & Analytical Instruments - Precision flow control in fuel systems and lab equipment.
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