Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment
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Product Highlights
- UHP Design: Ideal for semiconductor gas delivery with minimal particle generation.
- High-Pressure Capability: Rated for 20.5 MPa (3000 psi) for reliable performance.
- Leak-Tight Connection: Male 1/4 Metal Face Seal (MFS) for gas panels and vacuum systems.
- Zero Leakage: Diaphragm sealing technology prevents internal contamination.
- Corrosion Resistance: 316L stainless steel body with PTFE or EPDM diaphragms.
- Flexible Actuation: Available in manual and pneumatic actuator configurations.
- Semiconductor Grade: Ep Grade suitable for etching, CVD, ALD, and ion implantation.
- In Stock Delivery: Fast delivery available with a minimum order of 2 PCS.
Product Attributes
- Customization
- Available
- Media
- Gas
- Temperature
- Ordinary Temperature
- Model NO.
- UHP Diaphragm Valve
- Actuator
- Pneumatic
- Connection
- Metal Face Seal
- Material
- Stainless Steel
- Structure
- Diaphragm Valve
- Pressure
- Low Pressure
- Flow Direction
- Special Gases
- Function
- Control Pressure
- Usage
- Flow Control
- Standard
- ASTM
- Application
- Semiconductor
- Grade
- Ep Grade
- Connection Type
- Metal Face Seal
- Delivery
- in Stock
- MOQ
- 2PCS
- Transport Package
- Standard
- Specification
- 1/4" metal face seal
- Trademark
- NAI LOK
- Origin
- Shanghai
- Production Capacity
- 1000
- Package Size
- 50.00cm * 50.00cm * 30.00cm
- Package Gross Weight
- 35.000kg
Shipping
- Shipping Cost:
- Contact the supplier about freight and estimated delivery time.
Online Trading Protection
- Payment Guarantee
-
Platform-protected payments with refund support for eligible order issues.
- Platform Logistics
- Clearer shipment tracking with platform-supported logistics.
- Inspection Service
- Optional pre-shipment inspection for quality and quantity checks.
- After-Sales & Dispute Handling
- Platform-assisted dispute resolution, including refunds or returns when applicable.
Only orders placed and paid through Made-in-China.com Secured Trading are eligible for payment protection and the corresponding platform services.
Product Images of Nai-Lok UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1MPa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment
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Product Description
NAI-LOK UHP Ultra High Purity Gas 1 4 Male Metal Face Seal Low Pressure 1Mpa Pneumatic Actuating Diaphragm Valve for Semiconductor Specialty Gases Equipment
We have the capability to manufacture and supply 4 different product categories, including:1. General Instrumentation Valves and Fittings
2. High Purity & Ultra High Purity Products- NAI-LOK UHP PRODUCTS
3. Hose & Tubing
4. Special Alloy Valves
We strive to develop, serve global customers and provide stable and reliable products.
The NAI-LOK Ultra High Purity (UHP) Diaphragm Valve is engineered for high-pressure, ultra-clean gas and fluid control in semiconductor, pharmaceutical, and specialty gas industries. Available in manual and pneumatic actuator configurations, this valve delivers exceptional sealing performance, corrosion resistance, and contamination-free operation at pressures up to 20.5 MPa (3000 psi).
Ultra High Purity (UHP) Design - Ideal for semiconductor gas delivery, chemical processing, and high-purity applications with minimal particle generation.
High-Pressure Capability - Rated for 20.5 MPa (3000 psi), ensuring reliable performance in demanding environments.
Male 1/4" Metal Face Seal (MFS) - Leak-tight connection for gas panels, vacuum systems, and high-purity gas lines.
Diaphragm Sealing Technology - Prevents internal contamination and ensures zero leakage, critical for UHP processes.
Corrosion-Resistant Materials - 316L stainless steel body with PTFE or EPDM diaphragms for chemical compatibility.
Manual & Pneumatic Actuation Options - Flexible control for automated or manual operation.
| Inlet Pressure | 3.500psig[241bar) |
| For UR101 300 pisg[21bar) | |
| UR 101 | 1 to 10 psig(0.07 to 0.7bar) |
| UR 102 | 1 t0 30psig(0.07 to 2bar) |
| UR 106 | 2 to 60psig(0.14to 4bar) |
| UR 1001 | 2 to 100psig(0.14 to 7bar) |
| UR 1005 | 5 to 150psig(0.34 to 10bar) |
| Design Proof Pressure | 5000psig[345bar) |
| Burst Pressure | 10000psig(690bar) |
For Diaphgram Valve
| Body Material | SS316L |
| Diaphragm | Nicke-cobalt alloy |
| Seat Packing | PCTFE |
| Handle | ADC12 |
-
Semiconductor Manufacturing - Gas distribution for etching, CVD, ALD, and ion implantation.
-
Pharmaceutical & Biotechnology - Sterile fluid handling in API production and cleanroom environments.
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Specialty Gas Systems - Safe control of high-purity, toxic, or corrosive gases.
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Aerospace & Analytical Instruments - Precision flow control in fuel systems and lab equipment.








About the Supplier
This supplier has been audited by TÜV Rheinland. Verify the report on the official TÜV Rheinland website with ID "MIC-ASI264759". Items marked "" are certified.
Company Profile
Established in 2000, NAI-LOK has made a name of itself in the list of top suppliers of in China. We focus on the production, research and development, sales of instrumentation valves and alloy valves. We have more than 20 years of precision valve manufacturing and 10 years of export experience.
Our strict control and management of the entire production process enables us to provide products that meet our customers' requirements for product safety, functionality and design at competitive prices, while ensuring the shortest lead times in the market.
We have the capability to manufacture and supply 4 different product categories, including:
1. General Instrumentation Valves and Fittings
2. High Purity & Ultra High Purity Products- NAI-LOK UHP PRODUCTS, Regulator, Bellows Valve, 3 PC high purity ball valve, Diaphragm Valve, Weld Fitting, Face seal Fitting, Gas Stick.
3. Hose & Tubing
4. Special Alloy Valves, fitting and tubings. Including material S31254 (6 Moly), Alloy 400, HC-276, C22, B3, Alloy 625, Duplex steel 2205 /2507 etc.
We hope there will be opportunities for cooperation.
About Our Factory & Business Background
-
Business Type
- Manufacturer/Factory & Trading Company
- Address
- 397 Damuqiao Road, Shaxi Town, Taicang City, Suzhou, Jiangsu, China
-
Terms of Payment
- LC, T/T
-
International Commercial Terms(Incoterms)
- FOB, CIF, CFR, EXW
- Average Lead Time
-
Peak Season Lead Time: within 15 workdays
Off Season Lead Time: one month -
Nearest Port
- Shanghai Port
-
Minimum Order Quantity
- 1 Piece
Our Production Capability & Technical Expertise
- Main Products
- Gas Delivery System, Ball Valve, Pressure Regulator, Alloy Valve, 2/3/5 Valve Manifold, Instrumentation Ball Valves, Sample Cylinder, Pipe & Tube Fittings, Needle Valve, Hose & Tubing
-
Inspection Type for Finished Products
- 100% inspection(Visual inspection & Function inspection)
-
Inspection Method for Finished Products
- Have instructions and uniformly followed
-
Customization Options
- Customization from Samples, Customization from Designs, Full Customization, Minor Customization, Flexible customization
-
Traceability of Raw Materials
- Yes
Our Industry Experience & Global Business Record
- Main Markets
- North America, South America, Eastern Europe, Southeast Asia, Africa, Oceania, Mid East, Eastern Asia, Western Europe
-
Repeat Buyers Choice
- 50%~80%
Our Certifications, Standards & Industry Recognition
-
Management System Certification
- ISO9001:2015, ISO14001
FAQ
- What is the maximum pressure rating?
- The valve is rated for up to 20.5 MPa (3000 psi) and has a burst pressure of 10000 psig (690 bar).
- What materials are used for the valve body and diaphragm?
- The body is made of SS316L stainless steel, and the diaphragm uses a nickel-cobalt alloy, PCTFE seat packing, or EPDM options.
- What are the main application industries?
- It is used in semiconductor manufacturing, pharmaceuticals, specialty gas systems, and aerospace analytical instruments.
- What is the minimum order quantity (MOQ)?
- The minimum order quantity is 2 pieces.
- Is customization available?
- Yes, customization options include samples, designs, full customization, minor customization, and flexible customization.
- What are the payment terms?
- Payment terms include LC (Letter of Credit) and T/T (Telegraphic Transfer).
- What is the lead time for production?
- Peak season lead time is within 15 workdays, while off-season lead time is one month.
- What connection type does this valve use?
- It features a Male 1/4 Metal Face Seal (MFS) connection for leak-tight performance.
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