Nai-Lok Ultra High Purity 1/4 Metal Face Seal Low Pressure UHP Diaphragm Valve for Semiconductor Specialty Gases

Product Description

NAI-LOK Ultra High Purity 1/4 Metal Face Seal Low Pressure UHP Diaphragm Valve for Semiconductor Specialty Gases(UDM)

Product Description

The NAI-LOK Ultra High Purity 1/4" Metal Face Seal Low Pressure UHP Diaphragm Valve is specially engineered for semiconductor, photovoltaic, and specialty gas applications requiring extremely clean, corrosion-resistant, and low-leakage performance.
Manufactured from 316L stainless steel with electropolished internal surfaces (Ra ≤ 0.25 μm), this valve ensures minimal particle generation and maximum purity for ultra-clean gas delivery systems.
Its metal face seal design offers superior leak-tight connections for hazardous, corrosive, and high-purity gases, while the diaphragm mechanism prevents contamination and extends service life.
Ideal for UHP distribution systems, wafer fabrication tools, cleanroom gas panels, and specialty chemical delivery where process integrity is critical.

Key Features:
 

^{|.SS316L construction}

^{||.Excellent finish level of wetted areas with NAI-LOK's own electro polish process}

^{|||.For ultra-pure,flammable,or toxic fluid lines in semiconductor}

^{||||. All valves are helium leak tested}

Product Parameters

Parameter	Specification
Model	NAI-LOK UDM Diaphragm Valve
Valve Type	Diaphragm Valve
Connection Size	1/4-3/4 inch, Male/Female Face Seal/ Tube Weld
Material	316L Stainless Steel
Pressure Rating	Maximum 145 psi (10 bar)
Temperature Range	-20°C to 150°C (-4°F to 302°F)
Purity Level	Ultra High Purity (UHP)
Seal Material	PTFE / Other high purity elastomers (optional)
Application	Instrumentation, Semiconductor, Pharmaceutical, Chemical Process
Operation	Manual
Standards Compliance	ASTM, ISO, and industry standards

 

Detailed Photos