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NAI-LOK Stainless Steel 316L UHP Electropolishing 90 Degree Coaxial Tee Fittings 1/2x 1/4 Coaxial Tubing for Semiconductors and Microelectronics Application
COAX Series Coaxial Fittings
Introduction
The inner process tube adheres to stringent specifications for raw materials, electropolishing, cleaning, and packaging, meeting the exacting standards for cleanliness and performance in ultra-high-purity fluid systems. Simultaneously, the outer safety tube ensures secure containment and distribution of overflow fluids in the rare occurrence of a process tube leak. This dual-tube system, requiring only orbital welding, offers a straightforward installation process and seamless integration into existing systems and facilities.
Applications of UHP Coaxial Tubing:
Semiconductor Manufacturing: Ensures the purity of process gases, preventing defects in microelectronics production.
Pharmaceuticals and Biotechnology: Used in cleanrooms and sterile environments to ensure the uncontaminated transport of critical chemicals.
Chemical Processing: Provides a high-purity solution for chemical transport where contamination can compromise product quality.
Gas Delivery Systems: Ideal for delivering high-purity gases in research labs and high-tech manufacturing facilities.
Internal Surface Finish
Designator | Surface Finish [MU] | |
Average | Maximum | |
BA | < 0.4 | < 1.6 |
EP | < 0.125 | < 0.4 |
Tube O.D. | Wall Thickness | Pressure Rating | |
Psig | Bar | ||
1/4" | 1.00mm | 5200 | 359 |
0.89mm | |||
3/8" | 1.00mm | 3350 | 231 |
0.89mm | |||
1/2" | 1.24mm | 3750 | 259 |
3/4" | 1.65mm | 3350 | 231 |
1" | 1.65mm | 2400 | 265 |