Nai-Lok 316L Stainless Steel UHP Ultra High Purity Gas Delivery System Instrument Gas Pressure Panel Regulator Ep Grade

Product Details
Customization: Available
Media: Oil
Certification: CE
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Plant Area
15000 square meters
Management System Certification
ISO 9001
  • Nai-Lok 316L Stainless Steel UHP Ultra High Purity Gas Delivery System Instrument Gas Pressure Panel Regulator Ep Grade
  • Nai-Lok 316L Stainless Steel UHP Ultra High Purity Gas Delivery System Instrument Gas Pressure Panel Regulator Ep Grade
  • Nai-Lok 316L Stainless Steel UHP Ultra High Purity Gas Delivery System Instrument Gas Pressure Panel Regulator Ep Grade
  • Nai-Lok 316L Stainless Steel UHP Ultra High Purity Gas Delivery System Instrument Gas Pressure Panel Regulator Ep Grade
  • Nai-Lok 316L Stainless Steel UHP Ultra High Purity Gas Delivery System Instrument Gas Pressure Panel Regulator Ep Grade
  • Nai-Lok 316L Stainless Steel UHP Ultra High Purity Gas Delivery System Instrument Gas Pressure Panel Regulator Ep Grade
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Basic Info.

Model NO.
UHP Panel System
Temperature
Ordinary Temperature
Connection
Thread
Valve Seat
Single-Seat
Structure
Spring Diaphragm
Material
Stainless Steel
Keyword
UHP Pressure Regulator
Power
Manual
Size
1/4′′face Seal Female1/4inch
Province
Shanghai
MOQ
20
Inlet Pressure
0-3500 Psi
Body Material
Stainless Steel 316L
Outlet Vacuum
1 to 150psi
Flow Rates
Hf Option to 120 Slpm
Suitable Gas
High Purity Gas
Application
Semiconductor
Surface Finish
10 μim
Type
Single Stage
Model Number
UR100
Transport Package
Box Packing, Carton Box, Wooden Case
Specification
1/4 or 3/8
Trademark
NAI-LOK
Origin
China
HS Code
8481100090
Production Capacity
10000/Month

Packaging & Delivery

Package Size
30.00cm * 20.00cm * 10.00cm
Package Gross Weight
2.000kg

Product Description

Nai-Lok 316L Stainless Steel UHP Ultra High Purity Gas Delivery System Instrument Gas Pressure Panel Regulator Ep Grade

UHP Gas REGULATOR
 
 

Features

  • SS316L construction
  • 10μin. surface finish(25μin.optional)
  • Vacuum to 3500 pisg(241 bar) inlet
  • 1to 150psig (0.07 to 10bar) outlet
  • Cleaned,assembled and packaged for high purity semiconductor applications
  • Flow rates 

        - Standard to 30 slpm

        -HF option to 120slpm


Function
 
Soure pressure
Vacuum to 3,500 psig(241bar)
 
for UR101   300psig(21bar)
Delivery pressure
UR101
1 to 10 psig (0.07 to 0.7bar)
 
UR 102
1 to 30 psig(0.07 to 2bar)
 
UR 106
2 to 60 psig (0.14 to 4bar)
 
UR 1001
2 to 100psig(0.14 to 7 bar)
 
UR 1005
5 to 150psig(0.34 to 10bar)
Proof pressure
5,000psig(345bar)
Burst pressure
10,000(690bar)

Other Parameters
 
Inlet/outlet connectors
1/4 or 3/8 inch face seal or tube weld
Flow coefficient(Cv)
0.09(0.15 HF option)
Internal volume
0.49 in3 (8 cm3)
Operating Temperature
-40ºF to 160ºF 
Surface finish
10 μin.(0.25μm) Ra avg.standard
25 μin.(0.62 μm)Ra avg.optional
Inboard leakage
2 x 10-10 sccs
Outboard leakage
2 x 10-9 sccs He
Leakage across seat
4 x 10-8 sccs He
Installation
surface or panel(optional)
Supply Pressure effect
                                        HF
0.25 psig per 100 psig source pressure change
HF 0.75 pisg per 100 psig source pressure change

 
Nai-Lok 316L Stainless Steel UHP Ultra High Purity Gas Delivery System Instrument Gas Pressure Panel Regulator Ep Grade

Nai-Lok 316L Stainless Steel UHP Ultra High Purity Gas Delivery System Instrument Gas Pressure Panel Regulator Ep Grade
Nai-Lok 316L Stainless Steel UHP Ultra High Purity Gas Delivery System Instrument Gas Pressure Panel Regulator Ep Grade
Nai-Lok 316L Stainless Steel UHP Ultra High Purity Gas Delivery System Instrument Gas Pressure Panel Regulator Ep Grade

Nai-Lok 316L Stainless Steel UHP Ultra High Purity Gas Delivery System Instrument Gas Pressure Panel Regulator Ep Grade
Nai-Lok 316L Stainless Steel UHP Ultra High Purity Gas Delivery System Instrument Gas Pressure Panel Regulator Ep Grade
Nai-Lok 316L Stainless Steel UHP Ultra High Purity Gas Delivery System Instrument Gas Pressure Panel Regulator Ep Grade

 

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