Nai-Lok Ultra High Purity 1/2" Female Metal Face Seal Diaphragm Valve 145psi Low Pressure UHP Valve for Semiconductor Specialty Gas Equipment

• Customization: Available
• Media: Gas
• Certification: ISO
• Model NO.: UDM
• Temperature: Ordinary Temperature
• Connection: Thread
• Valve Seat: Single-Seat
• Structure: Diaphragm
• Material: Stainless Steel
• Application: Semiconductor Industrial
• Pressure: High Pressure/ Low Pressure
• Body: SS316 Alloy C276
• Grade: Ep Grade
• Transport Package: Standard
• Specification: 1/4" FNPT
• Trademark: NAI LOK
• Origin: Shanghai
• Production Capacity: 1000
• Package Size: 28.00cm * 12.00cm * 10.00cm
• Package Gross Weight: 2.000kg

Product Description

NAI-LOK Ultra High Purity 1/2" Female Metal Face Seal Diaphragm Valve | Low Pressure UHP Valve for Semiconductor Specialty Gas Equipment
 

Product Description

The NAI-LOK Ultra High Purity 1/2" Female Metal Face Seal Low Pressure UHP Diaphragm Valve is specifically designed for semiconductor manufacturing, specialty gas systems, and other applications requiring the highest level of cleanliness and leak integrity.
Made from corrosion-resistant 316L stainless steel, this valve features a precision metal face seal connection to ensure ultra-low particle generation and zero contamination.

The diaphragm design isolates the process media from the actuator, preventing leakage and ensuring reliable performance in demanding cleanroom environments.
It is suitable for low pressure applications and compatible with inert, corrosive, and toxic gases used in semiconductor fabrication and chemical processing.

Key Features:

^{|.SS316L construction}

^{||.Excellent finish level of wetted areas with NAI-LOK's own electro polish process}

^{|||.For ultra-pure,flammable,or toxic fluid lines in semiconductor}

^{||||. All valves are helium leak tested}
 

Product Parameters

Parameter	Specification
Model	NAI-LOK UDM Diaphragm Valve
Valve Type	Diaphragm Valve
Connection Size	1/4-3/4 inch, Male/Female Face Seal/ Tube Weld
Material	316L Stainless Steel
Pressure Rating	Maximum 145 psi (10 bar)
Temperature Range	-20°C to 150°C (-4°F to 302°F)
Purity Level	Ultra High Purity (UHP)
Seal Material	PTFE / Other high purity elastomers (optional)
Application	Instrumentation, Semiconductor, Pharmaceutical, Chemical Process
Operation	Manual
Standards Compliance	ASTM, ISO, and industry standards

 

Detailed Photos