Nai-Lok 1 MPa Low Pressure Ultra High Purity Metal Face Seal Diaphragm Valve for Semiconductor and Specialty Gas Systems

• Customization: Available
• Media: Gas
• Temperature: Ordinary Temperature
• Model NO.: UDM
• Actuator: Manual
• Connection: Clamp Diaphragm Valve
• Material: Stainless Steel
• Structure: Roof Type Diaphragm Valve
• Pressure: 1 MPa
• Usage: Flow Control
• Standard: ANSI
• Keyword: UHP Low Pressure Diaphragm Valve
• Power: Manual
• Size: 1/4''face Seal Female
• Province: Shanghai
• MOQ: 20
• Body Material: Stainless Steel 316L
• Diaphragm: Nickel Cobalt Alloy
• Connection Method: Face Seal Male / Female
• Suitable Gas: High Purity Gas
• Application: Semiconductor/UHP Gas
• Type: Single Stage
• Seat Packing: PCTFE
• Transport Package: Box Packing, Carton Box, Wooden Case
• Specification: 1/4-1/2
• Trademark: NAI-LOK
• Origin: China
• HS Code: 8481100090
• Production Capacity: 10000/Month
• Package Size: 30.00cm * 20.00cm * 12.00cm
• Package Gross Weight: 2.000kg

Product Description

NAI-LOK 1 MPa Low Pressure Ultra High Purity Metal Face Seal Diaphragm Valve for Semiconductor and Specialty Gas Systems

Product Description

The NAI-LOK UHP Metal Face Seal Diaphragm Valve is specifically engineered for ultra high purity gas delivery systems in semiconductor, photovoltaic, LED, and specialty gas industries. Designed to meet stringent cleanliness and leak-tightness requirements, it features a 316L stainless steel body, electropolished internal surfaces, and a compact low dead volume design.

This diaphragm valve provides outstanding corrosion resistance, minimal particle generation, and ultra-clean operation, making it ideal for applications where gas purity is critical. With a pressure rating of 1 MPa (145 psi) and metal-to-metal face seal connections, it ensures reliable and leak-free performance in high-demand environments.

Key Features:
 

^{|.SS316L construction}

^{||.Excellent finish level of wetted areas with NAI-LOK's own electro polish process}

^{|||.For ultra-pure,flammable,or toxic fluid lines in semiconductor}

^{||||. All valves are helium leak tested}

 

Product Parameters

Parameter	Specification
Brand	NAI-LOK
Model	UDM Series
Valve Type	Diaphragm Valve
Connection Type	Metal Face Seal
Connection Size	1/4-3/4 inch
Body Material	316L Stainless Steel (VAR or VIM/VAR)
Wetted Surface Finish	Electropolished, Ra ≤ 0.25 μm
Seat Material	Metal-to-metal seal
Pressure Rating	1 MPa (145 psi)
Temperature Range	-10°C to +150°C (14°F to 302°F)
Operating Handle	Manual knob or pneumatic actuator
Cleaning	UHP level cleaning with double bagging
Applications	Semiconductor, Specialty Gas, Photovoltaic, LED Manufacturing

 

Detailed Photos