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NAI-LOK UHP High Pressure 20.5MPa Pneumatic Diaphragm Valves 1/2 Male Face Seal UHP Diaphragm Valve for Vacuum System (UDB-P)
The NAI-LOK UDB-P Series Ultra High Purity (UHP) Pneumatic Diaphragm Valve is engineered for critical gas and vacuum applications in semiconductor, photovoltaic, and high-tech industries. Featuring a 316L stainless steel body with an electropolished surface (Ra ≤ 0.25 μm), it delivers exceptional corrosion resistance and particle-free performance.
This 1/2" Male Face Seal configuration ensures leak-tight connections for ultra-clean process lines. The valve supports working pressures up to 20.5 MPa (3000 psi) and is suitable for both high-purity gases and vacuum systems. The pneumatic actuator enables automated control, providing consistent, reliable operation in demanding environments.
Designed with minimal dead space, high Cv flow performance, and cleanroom assembly, the UDB-P valve meets stringent semiconductor-grade purity requirements.
Material: 316L stainless steel, electropolished (BPE / SEMI standard)
Connection: 1/2" Male Face Seal (compatible with standard VCR®-type fittings)
Operation: Pneumatic actuator for remote control
Pressure Rating: 20.5 MPa (3000 psi)
Media Compatibility: Ultra-pure gases, vacuum, specialty gases
Cleanroom Assembly: ISO Class 4 or better
Diaphragm: Metal-to-metal seal for zero particle generation
Application Industries: Semiconductor, photovoltaic, laboratory, analytical instrumentation
| Parameter | Specification |
|---|---|
| Model | UDB-P Series |
| Valve Type | Pneumatic Diaphragm Valve |
| Body Material | SS316L (BPE / SEMI electropolished) |
| Connection Size | 1/4-3/4" Male/Female Face Seal |
| Orifice Size | 4.8 mm (0.189") |
| Actuation | Pneumatic (Normally Closed / Normally Open options) |
| Max Working Pressure | 20.5 MPa (3000 psi) |
| Working Temperature | -10°C to +66°C (14°F to 150°F) |
| Surface Roughness | Ra ≤ 0.25 μm (10 μin) |
| Cleanroom Packaging | Double bagged in Class 100 cleanroom |
| Applications | UHP gas lines, vacuum systems, semiconductor fabs |