STS is an escrow service that protects both buyers and suppliers. Funds are held securely by Made-in-China.com until order terms (e.g., delivery, quality) are fulfilled
| Customization: | Available |
|---|---|
| Media: | Gas |
| Certification: | CE |
| Shipping Cost: | Contact the supplier about freight and estimated delivery time. |
|---|
Payment Guarantee
Platform-protected payments with refund support for eligible order issues.
Platform Logistics
Inspection Service
After-Sales & Dispute Handling
Suppliers with verified business licenses
Audited Supplier Audited by an independent third-party inspection agency
Ultra High Purity (UHP) Gas Stick for Semiconductor Applications
Nai-Lok UHP 1 4 Male Metal Face Seal Pressure Regulators for Control Pressure Specialty Gases in Semicon Clean Environment Ultra High Purity Gas Stick RegulatorThe Ultra High Purity (UHP) Gas Stick is a critical component in semiconductor fabrication, LED production, and pharmaceutical processing, where contamination-free gas delivery is essential. Designed to maintain 99.9999% (6N) purity, our UHP gas sticks ensure reliable, leak-free performance for etching, deposition, and other high-precision processes.
With electropolished stainless steel (SS316L) construction, high-performance valves, and metal face seal fittings, our gas sticks meet SEMI, ASME BPE, and ISO 9001 standards, making them ideal for semiconductor fabs, gas panels, and gas distribution systems.
Ultra High Purity (6N) Gas Delivery - Minimizes particulate and moisture contamination
Electropolished SS316L Tubing - Reduces surface roughness for optimal gas flow
High-Performance Diaphragm Valves - Ensures leak-tight shutoff and long service life
VCR/VCO Fittings - Metal-sealed connections for maximum leak integrity
SEMI & ASME BPE Compliant - Meets industry standards for semiconductor applications
Custom Configurations - Available in single or multi-gas designs
| Parameter | Specification |
|---|---|
| Material | SS316L Electropolished (Ra ≤ 5 µin) |
| Gas Purity | 99.9999% (6N) |
| Pressure Rating | Up to 1500 psi (10.3 MPa) |
| Leak Rate | <1x10 atm·cc/sec He |
| Surface Finish | <0.25 µm Ra (Electropolished) |
| Valve Type | Pneumatic/Manual Diaphragm Valves |
| Connections | metal face seal |
| Compliance | SEMI, ASME BPE, ISO 9001 |
| Inlet Pressure | 3.500psig[241bar) |
| For UR101 300 pisg[21bar) | |
| UR 101 | 1 to 10 psig(0.07 to 0.7bar) |
| UR 102 | 1 t0 30psig(0.07 to 2bar) |
| UR 106 | 2 to 60psig(0.14to 4bar) |
| UR 1001 | 2 to 100psig(0.14 to 7bar) |
| UR 1005 | 5 to 150psig(0.34 to 10bar) |
| Design Proof Pressure | 5000psig[345bar) |
| Burst Pressure | 10000psig(690barl |
| Body Material | SS316L |
| Diaphragm | Nicke-cobalt alloy |
| Seat Packing | PCTFE |
| Handle | ADC12 |
Semiconductor Manufacturing - For etching (CF4, SF6), deposition (SiH4, NH3), and ion implantation
LED & Solar Cell Production - Ensures high-purity gas supply for MOCVD processes
Pharmaceutical & Biotechnology - Used in sterile gas delivery systems
Analytical Instruments - Supports GC, ICP-MS, and other high-precision analyzers
Ultra High Purity Gas Stick Semiconductor Gas Delivery System High-Purity Gas Panel Components 6N Gas Stick for Etching & Deposition SS316L Electropolished Gas Manifold Metal Face Seal Fittings for UHP Applications SEMI-Compliant Gas Distribution System Leak-Free Gas Stick for Fabs
){kind=link}